- XRD Measurement System
- PL Mapping System
- ECV
- Sheet Rezistance
- Hall Effect Measurement System (HEMS)
- Elipsometre
- SEM
- Spectrophotometer
- Probe-station
- Profilmeter
- Optical Microscope
- LIV Measurement
- Process Design
- Rapid Thermal Processing
- Ion Beam Asisted Di Electric Coating
- Mask Aligner
- Mask Writer
- Laser Lithograpy Photo Mask Production
- Wafer Dicing (2" to 6")
- Wafer Scribe and Breaker
- PECVD coating
- Wafer Grinding & Polishing
- Metal Coatings (e-beam evaporator)
- Sputter Coatings
- ICP
- RIE